TYPE OF COURSE UNIT	Elective Course
LEVEL OF COURSE UNIT	Master's Degree Without Thesis
YEAR OF STUDY	-
SEMESTER	-
NUMBER OF ECTS CREDITS ALLOCATED	10
NAME OF LECTURER(S)	-
LEARNING OUTCOMES OF THE COURSE UNIT	At the end of this course, the students; 1) Recognizing the importance of MEM systems. 2) Being able to generate coupled system of equations in MEM systems. 3) Analyzing MEM systems with beam and plate theories. 4) Learning the fundamentals of electrodynamics. 5) Apprehending the today and future application areas of the MEM systems.
MODE OF DELIVERY	Face to face
PRE-REQUISITES OF THE COURSE	No
RECOMMENDED OPTIONAL PROGRAMME COMPONENT	None
COURSE DEFINITION	MEM materials, micro mechanic processes, MEM structures and systems, industrial, photonic and RF applications, packaging and safety.
COURSE CONTENTS	WEEK TOPICS 1st Week Course overview, non-dimensionalization, and single degree of freedom systems 2nd Week Elastic MEMS and kinematics of continua 3rd Week Equilibrium equations, constitutive equations in linear elasticity, and Navier's equations 4th Week Strings and membranes 5th Week Beam theory 6th Week Variational calculus: Lagrange equations and an alternative way to look at strings, membranes, and plates 7th Week Midterm 8th Week Plate theory 9th Week Plate problems 10th Week Fundamentals of electrodynamics and small is different 11th Week Analysis of single degree of freedom models for electrostatically actuated MEMS 12th Week Modeling electro statically actuated micro membranes 13th Week Modeling and numerical analysis of electro statically actuated micro beams and 14th Week micro plates 15th Week Final Exam
RECOMENDED OR REQUIRED READING	Nano- and Micro-Electromechanical Systems: Fundamentals of Nano- and Microengineering, Second Edition (Nano- and Microscience, Engineering, Technology, and Medicine Series) An Introduction to Microelectromechanical Systems Engineering, Second Edition by Nadim Maluf and Kirt Williams
PLANNED LEARNING ACTIVITIES AND TEACHING METHODS	Lecture,Case Study
ASSESSMENT METHODS AND CRITERIA	Quantity Percentage(%) Mid-term 1 30 Assignment 5 20 Total(%) 50 Contribution of In-term Studies to Overall Grade(%) 50 Contribution of Final Examination to Overall Grade(%) 50 Total(%) 100
ECTS WORKLOAD	Activities Number Hours Workload Midterm exam 1 3 3 Preparation for Quiz Individual or group work 14 3 42 Preparation for Final exam 1 50 50 Course hours 14 3 42 Preparation for Midterm exam 1 30 30 Laboratory (including preparation) Final exam 1 3 3 Homework 5 25 125 Total Workload 295 Total Workload / 30 9,83 ECTS Credits of the Course 10
LANGUAGE OF INSTRUCTION	Turkish
WORK PLACEMENT(S)	No